Compared with external hydrogen pipeline supply, DNX does not require an additional gas supply system. It offers fast response and high adaptability, allowing flexible adjustment according to process conditions while maintaining stable and excellent NOx removal performance. Customer test results have also shown that DNX performs better than systems using externally supplied hydrogen.
With its modular design, DNX can be flexibly expanded according to different process exhaust flow rates and NOx concentration requirements. It also integrates a control system with real-time monitoring, flow control, and multiple safety protection mechanisms to ensure stable long-term operation.
In addition, DNX has passed SEMI S2 safety and relevant explosion-proof certifications, meeting the semiconductor industry’s stringent requirements for equipment safety, reliability, and production-line compatibility.
DNX is an efficient solution for NOx control in semiconductor exhaust gas treatment systems, combining safety, environmental performance, and ease of operation. It also supports compliance with increasingly stringent environmental regulations and ESG sustainability requirements.
