The DNX product series is a technology-proven De-NOx module kit developed by Toplus, specifically designed for Local Scrubber (LSC) applications in semiconductor sector. Installed directly inside the LSC cabinet, DNX effectively and continuously eliminate nitrogen oxides (NOx) from exhaust gases, ensuring compliance with emission standards required by semiconductor manufacturers.
Featuring a compact, modular design, DNX can be flexibly installed inside the LSC enclosure. The product is designed to comply with applicable safety and explosion-proof regulations, making it suitable for high-standard semiconductor fab environments.
DNX Installation Diagram Example:
